Ngā Tātari Hiri C Maunga Mata IGS Mahi-Teitei mō ngā Pūnaha Tuku Hau Ārahi-Haupapa
Whakaahuatanga
Kua hangaia ngā Tātari Maunga Mata HENGKO hei whakatutuki i ngā whakaritenga nui o ngā pūnaha hau whakauru e whakamahia ana i roto i ngā taputapu OEM semiconductor. Mā te tuku i te tātari ārahi-a-umanga i te 0.003 µm, ka whakarite ēnei tātari i te mahi tino pai me te pono me te whai huatanga hopu matūriki o ≥99.9999999% (9-LRV) i te 120 slpm.
He mea hanga ēnei tātari mai i te paura maitai kore waikura 316L pakari i whakatōkia mō te huānga tātari me te whare, ā, e tutuki ana ēnei tātari i ngā whakaritenga SEMI F86-0304, e whakaatu ana i ngā wāhanga e rua-awa kua whakaritea mō ngā pūnaha tohatoha hau 1.125” me te whirihoranga hiri-C. Ka tautokohia e rātou te pēhanga urunga mōrahi o te 3.4 MPa i te 100°C me te rerekētanga pēhanga mahi mōrahi o te 0.69 MPa i te 100°C.
Ko ēnei tātari motuhake, e hototahi ana ki ngā whakaritenga hiri momo-C me te momo-W, ka tutuki ai te ma o te awa me te tukunga matūriki o
Me te mutunga mata o Ra< 1.6 µm i te taha o waho, ā, ko Ra< 0.13 µm i te taha o roto, kua hangaia kia tu atu i ngā pāmahana teitei tae atu ki te 460°C. He mea hanga kia ngāwari te whakauru me te whakapai ake i te hoahoa modular, ka māmā ake te tāutanga me te tiaki, ka āwhina ki te arotau i te mahi a te pūnaha i roto i ngā tono tuku hau hau-irahiko me te whakahaere.
Āhuatanga Hua
▶ Hanganga katoa he kowiri tira 316L
▶ Hoahoa iti, hanganga kiato, penapena wāhi
▶ Ngā āhuatanga whakakapinga me te mimiti hau tino pai
▶ Te ātete ki te pāmahana teitei, te pēhanga teitei, me te waikura
▶ Whare maitai kore waikura 316L kua orohia-hiko
▶ He ngāwari, he whai hua hoki te tāutanga me te tiaki
▶ Hiri ā-mīhini, kāore i te honoa ki te rauemi
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Pepa raraunga
| Ngā Tawhā Hangarau | Ngā Uara |
|---|---|
| Rauemi Huānga Tātari | Paura Kowiri tira 316L |
| Rauemi Whare | 316L Kowiri tira |
| Pēhanga Tomokanga Mōrahi | 3.4 MPa @ 100°C |
| Te Rerekētanga Whakahaere Mōrahi | 0.69 MPa @ 100°C |
| Te Reiti Tātaritanga Hīriama | 1x10⁻¹¹ cc/min |
| Te Reiti Tātari o te Whakamātautau Hīriama | 1x10⁻⁹ cc/min |
| Te Maimoatanga Mata | Mata o Waho Ra< 1.6 µm |
| Mata o roto o Ra< 0.13 µm | |
| Te Pāmahana Whakahaere Mōrahi | 460°C |
| Te Whai Hua o te Taupoki Matūriki | ≥99.9999999% (9-LRV) @ 120 slpm (MPPS Tohutoro, ngā matūriki katoa) |
| Te Horoi o te Awaawa | Tukunga Matūriki:< 0.03 matūriki/rita (< 1 matūriki/ft³) |
| Ngā mea whakakorikori:< 10 ppb makuku | |
| Rahi o te Taupoki Matūriki | ≥0.003 μm |
| Awhe Rere | 0 ~ 120 slppm |
Rahi

Anei te nama wāhanga ka taea e koe te tono me ngā taipitopito rahi:
| Tauira Hua | Tere Rere | Teitei H (mm) | Te Tika o te Tātari | Taumata Horoi |
|---|---|---|---|---|
| Z01B-00637 | 10 slppm | 51.6 | 0.003 µm | C |
| Z01B-00638 | 40 slppm | 82.9 | 0.003 µm | C |
| Z01B-00687 | 80 slppm | 126.2 | 0.003 µm | C |
| Z01B-00688 | 120 slppm | 167.9 | 0.003 µm | C |
Ngā tono noa
Hei whakamahi me ngā pūnaha tuku hau modular hiri-W me te hiri-C, 1.125” me te 1.5” te teitei o te mata.
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